Plazmos Paviršiaus Apdorojimo Sistema | Tetra 100 - Žemo Slėgio Plazmos Sistema, Plazmos Paviršiaus Apdorojimo Sistema, Plazmos Valytuvas
Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Tetra 100 low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of approx. 100 litres of this plasma system offers enough space to serve series production / automation.
Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised.
Fields of application:
VOC-free cleaning of organic residues
Activation before painting, gluing, potting, ...
Etching of PTFE, photoresist, oxide layers, ...
Super-hydrophobic and -hydrophilic coatings
Dimensions (Stand Alone - 19" Rack):600 mm x 1700 - 2100 mm x 800 mm (WxHxD)
Vacuum Chamber material:Stainless steel, Aluminium
Vacuum Chamber dimensions:approx. 400 mm x 400 mm x 625 mm (WxHxD) - Dmax 3 m
Vacuum Chamber volume:approx. 100 litres
Vacuum Chamber closure:Hinged door, automatic door
Gas supply:Mass flow controllers (MFCs)
Pressure measurement:Pirani, Capacity pressure gauge
Generator:80 kHz; 13,56 MHz; 2,45 GHz
Electrodes:According to customer requirements
Controles:Basic PC (Win.CE), Full PC (Win.10 IoT)
Power supply:400 V / 50 - 60 Hz
Vacuum pump:According to customer requirements